Stress tuning in AIN thin films

Vakuum in Forschung und Praxis 1991 Vol. 3; Iss. 2

Stress tuning in AIN thin films

E. Rille, H. Öfner, R. Zarwasch, H. K. Pulker
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Volume:
3
Year:
1991
Language:
english
DOI:
10.1002/vipr.2230030212
File:
PDF, 1.70 MB
english, 1991
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