The thermal stability of Al(1%wtSi)/Zr EUV mirrors

Applied Physics A: Materials Science & Processing 2012 / 10 Vol. 109; Iss. 1

The thermal stability of Al(1%wtSi)/Zr EUV mirrors

Zhong, Qi, Zhang, Zhong, Zhu, Jingtao, Wang, Zhanshan, Jonnard, Philippe, Guen, Karine, Yuan, Yanyan, André, Jean-Michel, Zhou, Hongjun, Huo, Tonglin
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Volume:
109
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-012-7085-1
Date:
October, 2012
File:
PDF, 714 KB
english, 2012
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