Analysis and fabrication of a novel MEMS pendulum angular...

Microsystem Technologies 2013 / 01 Vol. 19; Iss. 1

Analysis and fabrication of a novel MEMS pendulum angular accelerometer with electrostatic actuator feedback

Jianli Li, Jiancheng Fang, Min Du, Haifeng Dong
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Volume:
19
Language:
english
DOI:
10.1007/s00542-012-1630-x
Date:
January, 2013
File:
PDF, 513 KB
english, 2013
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