Thermal crystallization kinetic and electrical properties of partly crystallized amorphous indium oxide thin films sputtering deposited in the presence or the absence of water vapor
Meihan Wang, Hao Lei, Yoshiyuki Seki, Shigeyuki Seki, Yutaka Sawada, Yoichi Hoshi, Shaohong Wang, Lixian SunVolume:
111
Language:
english
DOI:
10.1007/s10973-012-2526-9
Date:
February, 2013
File:
PDF, 420 KB
english, 2013