![](/img/cover-not-exists.png)
Scan nonlinearity of a scanning electron microscope
V. V. Alzoba, V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. FilippovVolume:
55
Language:
english
DOI:
10.1007/s11018-012-0089-6
Date:
December, 2012
File:
PDF, 223 KB
english, 2012