Investigation of the metrological characteristics of a...

Measurement Techniques 2012 / 07 Vol. 55; Iss. 4

Investigation of the metrological characteristics of a scanning probe measuring microscope using TGZ type calibration gratings

K. V. Gogolinskii, K. L. Gubskii, A. P. Kuznetsov, V. N. Reshetov, I. I. Maslenikov, S. S. Golubev, V. G. Lysenko, S. I. Rumyantsev
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Volume:
55
Language:
english
DOI:
10.1007/s11018-012-9972-4
Date:
July, 2012
File:
PDF, 208 KB
english, 2012
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