Modulation interference microscope as a tool for measuring the linear dimensions of nanostructures
A. G. Andreev, S. N. Grigoriev, E. V. Romash, S. V. Bushuev, P. S. Ignatiev, A. V. Loparev, K. V. Indukaev, P. A. OsipovVolume:
55
Language:
english
DOI:
10.1007/s11018-012-9996-9
Date:
August, 2012
File:
PDF, 214 KB
english, 2012