Material Removal Mechanism of Copper CMP from a Chemical–Mechanical Synergy Perspective
Jing Li, Yuhong Liu, Xinchun Lu, Jianbin Luo, Yuanjing DaiVolume:
49
Language:
english
DOI:
10.1007/s11249-012-0037-2
Date:
January, 2013
File:
PDF, 676 KB
english, 2013