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How to reduce the Al-texture in AlN films during film preparation
Ju-qian Yin 阴聚乾, Xi-ming Chen 陈希明, Bao-he Yang 杨保和, Qian Zhang 张倩, Xiao-guo Wu 吴晓国Volume:
8
Language:
english
DOI:
10.1007/s11801-012-2274-x
Date:
September, 2012
File:
PDF, 182 KB
english, 2012