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Aerosol assisted chemical vapour deposition of germanium thin films using organogermanium carboxylates as precursors and formation of germania films
ALPA Y SHAH, AMEY WADAWALE, VIJAYKUMAR S SAGORIA, VIMAL K JAIN, C A BETTY, S BHATTACHARYAVolume:
35
Language:
english
DOI:
10.1007/s12034-012-0302-x
Date:
June, 2012
File:
PDF, 376 KB
english, 2012