Fast evaluation of period deviation and flatness of a linear scale by using a Fizeau interferometer
Woo Jae Kim, Yuki Shimizu, Akihide Kimura, Wei GaoVolume:
13
Language:
english
DOI:
10.1007/s12541-012-0200-6
Date:
September, 2012
File:
PDF, 6.52 MB
english, 2012