Fast evaluation of period deviation and flatness of a...

Fast evaluation of period deviation and flatness of a linear scale by using a Fizeau interferometer

Woo Jae Kim, Yuki Shimizu, Akihide Kimura, Wei Gao
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Volume:
13
Language:
english
DOI:
10.1007/s12541-012-0200-6
Date:
September, 2012
File:
PDF, 6.52 MB
english, 2012
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