Fabrication of a piezoelectric microcantilever array with a...

International Journal of Precision Engineering and Manufacturing 2012 / 09 Vol. 13; Iss. 9

Fabrication of a piezoelectric microcantilever array with a large initial deflection and an application to electrical energy harvesting

Hyung Hoon Kim, Sung Hwan Yoon, Cheol Hee Ahn, Shuji Tanaka, Masayoshi Esashi, Sang Choon Ko, Won Ick Jang, Jeung Sang Go
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Volume:
13
Language:
english
DOI:
10.1007/s12541-012-0219-8
Date:
September, 2012
File:
PDF, 737 KB
english, 2012
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