On the role of chlorine in the vapour phase epitaxy of...

On the role of chlorine in the vapour phase epitaxy of (100)GaAs as evidenced by leed and rheed

J.B. Theeten, F. Hottier
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Volume:
58
Year:
1976
Language:
english
DOI:
10.1016/0039-6028(76)90493-3
File:
PDF, 328 KB
english, 1976
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