Silicon-based chlorine sensor with on-wafer deposited...

Analytica Chimica Acta 1992 Vol. 269; Iss. 1

Silicon-based chlorine sensor with on-wafer deposited chemically anchored diffusion membrane: Part I. Basic sensor concept

Albert van den Berg, Milena Koudelka-Hep, Bart H. van der Schoot, Nico F. de Rooij, Elisabeth Verney-Norberg, Alain Grisel
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Volume:
269
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0003-2670(92)85135-s
File:
PDF, 490 KB
english, 1992
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