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Selective deposition of diamond films on silicon wafer with SiO2 masks by tungsten filament chemical vapor deposition
Yu San, Jin Zengsun, Lu Xianyi, Zou GuangtianVolume:
10
Year:
1991
Language:
english
DOI:
10.1016/0167-577x(91)90155-y
File:
PDF, 417 KB
english, 1991