Growth kinetics and characterization of low pressure...

Growth kinetics and characterization of low pressure chemically vapor deposited Si3N4 films from (C4H9)2SiH2 and NH3

J.M. Grow, R.A. Levy, X. Fan, M. Bhaskaran
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Volume:
23
Year:
1995
Language:
english
DOI:
10.1016/0167-577x(95)00041-0
File:
PDF, 600 KB
english, 1995
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