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Effect of source gas composition on the synthesis of SiCC functionally gradient materials by CVD
Yootaek Kim, Jun-Tae Choi, Jong Koen Choi, Keun Ho AuhVolume:
26
Year:
1996
Language:
english
DOI:
10.1016/0167-577x(95)00228-6
File:
PDF, 944 KB
english, 1996