Characterization of SiC in DLC/a-Si films prepared by...

Applied Surface Science 2012 Vol. 258; Iss. 15

Characterization of SiC in DLC/a-Si films prepared by pulsed filtered cathodic arc using Raman spectroscopy and XPS

C. Srisang, P. Asanithi, K. Siangchaew, A. Pokaipisit, P. Limsuwan
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Volume:
258
Year:
2012
Language:
english
DOI:
10.1016/j.apsusc.2012.02.036
File:
PDF, 777 KB
english, 2012
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