Influence of the sputtering reactive gas on the oxide and oxynitride LaTiON deposition by RF magnetron sputtering
Lu, Y., Le Paven-Thivet, C., Benzerga, R., Le Gendre, L., Sharaiha, A., Tessier, F., Cheviré, F.Volume:
264
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2012.10.059
Date:
January, 2013
File:
PDF, 1.24 MB
english, 2013