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Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing
Hyuk-Min Kim, R. Prasanna Venkatesh, Tae-Young Kwon, Jin-Goo ParkVolume:
411
Year:
2012
Language:
english
DOI:
10.1016/j.colsurfa.2012.07.009
File:
PDF, 1.04 MB
english, 2012