A calculating method for the fewest cutting passes on sapphire substrate at a certain depth using specific down force energy with an AFM probe
Zone-Ching Lin, Ying-Chih HsuVolume:
212
Year:
2012
Language:
english
DOI:
10.1016/j.jmatprotec.2012.07.004
File:
PDF, 1.20 MB
english, 2012