Thin film membrane based on a-SiGe: B and MEMS technology...

Journal of Non-Crystalline Solids 2012 Vol. 358; Iss. 17

Thin film membrane based on a-SiGe: B and MEMS technology for application in cochlear implants

Aurelio Heredia, Roberto Ambrosio, Mario Moreno, Carlos Zuñiga, Abimael Jiménez, Karim Monfil, Javier de la Hidalga
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Volume:
358
Year:
2012
Language:
english
DOI:
10.1016/j.jnoncrysol.2011.12.101
File:
PDF, 551 KB
english, 2012
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