Processing of photonic crystals in InP membranes by focused ion beam milling and plasma etching
Thomas Kusserow, Matthias Wulf, Ricardo Zamora, Kelash Kanwar, Hartmut HillmerVolume:
102
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.02.019
File:
PDF, 695 KB
english, 2013