Contact end resistance test structure applied for...

Contact end resistance test structure applied for nanocontact measurements

J. Santander, I. Martin-Fernandez, X. Borrisé, G. Rius, C. Cané
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Volume:
99
Year:
2012
Language:
english
DOI:
10.1016/j.mee.2012.05.013
File:
PDF, 491 KB
english, 2012
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