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Fabricating bi-layered metallic wire-grid polarizers by nanoimprint and O2 plasma etching
Chia-Meng Chen, Pei-Lun Niu, Cheng-Kuo Sung, Cheng-Huan ChenVolume:
102
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.05.025
File:
PDF, 1.31 MB
english, 2013