Adhesion effect of interface layers on pattern fabrication...

Microelectronic Engineering 2013 Vol. 103; Iss. none

Adhesion effect of interface layers on pattern fabrication with GeSbTe as laser thermal lithography film

Changmeng Deng, Yongyou Geng, Yiqun Wu, Yang Wang, Jinsong Wei
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Volume:
103
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.08.018
File:
PDF, 892 KB
english, 2013
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