Design optimization of laser-induced microbridges for low...

Microelectronic Engineering 2013 Vol. 103; Iss. none

Design optimization of laser-induced microbridges for low resistance interline connections in ICs

Kuan-Jung Chung, Martin Peckerar, Joseph B. Bernstein
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Volume:
103
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.08.028
File:
PDF, 1.09 MB
english, 2013
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