2D spectroscopic observation on effect of nitrogen species on CH abundance and morphology of carbonaceous film by plasma-enhanced CVD
Qingchun Shen, Yasushi Miyata, Toshiki Suzuki, Shigeaki Morita, Kuniyuki KitagawaVolume:
106
Year:
2013
Language:
english
DOI:
10.1016/j.microc.2012.10.001
File:
PDF, 645 KB
english, 2013