![](/img/cover-not-exists.png)
Temperature effects on the bulk discharge current of dielectric films of MEMS capacitive switches
M. Koutsoureli, L. Michalas, G. PapaioannouVolume:
52
Year:
2012
Language:
english
DOI:
10.1016/j.microrel.2012.06.005
File:
PDF, 568 KB
english, 2012