Spherical aberration correction in aplanatic solid...

Microelectronics Reliability 2012 Vol. 52; Iss. 9-10

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Y. Lu, E. Ramsay, C.R. Stockbridge, A. Yurt, F.H. Köklü, T.G. Bifano, M.S. Ünlü, B.B. Goldberg
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
52
Year:
2012
Language:
english
DOI:
10.1016/j.microrel.2012.06.026
File:
PDF, 470 KB
english, 2012
Conversion to is in progress
Conversion to is failed