Large size MEMS scanning mirror with vertical comb drive for tunable optical filter
Yingming Liu, Jing Xu, Shaolong Zhong, Yaming WuVolume:
51
Year:
2013
Language:
english
DOI:
10.1016/j.optlaseng.2012.07.019
File:
PDF, 1.20 MB
english, 2013