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Investigation of Dielectric Losses in Hydrogenated Amorphoussilicon (a-Si:H) thin Films Using Superconducting Microwave Resonators
A. Bruno, S.T. Skacel, Ch. Kaiser, S. Wünsch, M. Siegel, A.V. Ustinov, M.P. LisitskiyVolume:
36
Year:
2012
Language:
english
DOI:
10.1016/j.phpro.2012.06.154
File:
PDF, 429 KB
english, 2012