Triode technology in the sputter deposition of carbon films
A.G. Fitzgerald, M. Simpson, G.A. Dederski, P.A. MoiR, A. Matthews, D. TitherVolume:
26
Year:
1988
Language:
english
Pages:
6
DOI:
10.1016/0008-6223(88)90042-5
File:
PDF, 575 KB
english, 1988