The effect of flow rate on microwave-assisted diamond CVD

The effect of flow rate on microwave-assisted diamond CVD

F.G. Celii, A.J. Purdes
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Volume:
28
Year:
1990
Language:
english
DOI:
10.1016/0008-6223(90)90315-p
File:
PDF, 92 KB
english, 1990
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