Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu TabataVolume:
53
Year:
2012
Language:
english
DOI:
10.1016/j.polymer.2012.08.050
File:
PDF, 1.05 MB
english, 2012