The Novel Sensitivity Improved Surface Micromachined MEMS...

Procedia Engineering 2011 Vol. 25; Iss. none

The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane

Chang Han Je, Jaewoo Lee, Woo Seok Yang, Jongdae Kim
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Volume:
25
Year:
2011
Language:
english
DOI:
10.1016/j.proeng.2011.12.145
File:
PDF, 816 KB
english, 2011
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