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Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations
A.T. Tran, G. Pandraud, H. Schellevis, T. Alan, V. Aravindh, O. Wunnicke, P.M. SarroVolume:
25
Year:
2011
Language:
english
DOI:
10.1016/j.proeng.2011.12.166
File:
PDF, 650 KB
english, 2011