Investigation of a Piezoelectric Driven MEMS Mirror based...

Procedia Engineering 2011 Vol. 25; Iss. none

Investigation of a Piezoelectric Driven MEMS Mirror based on Single S-shaped PZT Actuator

Kah How Koh, Takeshi Kobayashi, Huicong Liu, Chengkuo Lee
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Volume:
25
Year:
2011
Language:
english
DOI:
10.1016/j.proeng.2011.12.173
File:
PDF, 612 KB
english, 2011
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