![](/img/cover-not-exists.png)
A low-cost built-in self-test method for resistive MEMS sensors
O. Legendre, H. Bertin, O. Garel, H. Mathias, S. Megherbi, K. Jafari, J. Juillard, E. ColinetVolume:
25
Year:
2011
Language:
english
DOI:
10.1016/j.proeng.2011.12.318
File:
PDF, 439 KB
english, 2011