Anodic Bonding of Glass-to-Glass through Magnetron...

Procedia Engineering 2011 Vol. 25; Iss. none

Anodic Bonding of Glass-to-Glass through Magnetron Spattered Nanometric Silicon Layer

Pawel Knapkiewicz, Bartlomiej Cichy, Witold Posadowski, Katarzyna Tadaszak, Patrycja Sniadek, Jan Dziuban
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Volume:
25
Year:
2011
Language:
english
DOI:
10.1016/j.proeng.2011.12.403
File:
PDF, 561 KB
english, 2011
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