Advances in Electrochemical Micromachining of Silicon: Towards MEMS Fabrication
Margherita Bassu, Lucanos M. Strambini, Giuseppe BarillaroVolume:
25
Year:
2011
Language:
english
DOI:
10.1016/j.proeng.2011.12.409
File:
PDF, 702 KB
english, 2011