Characterization of Nanostructured TiZrN Thin Films...

Procedia Engineering 2012 Vol. 32; Iss. none

Characterization of Nanostructured TiZrN Thin Films Deposited by Reactive DC Magnetron Co-sputtering

S. Chinsakolthanakorn, A. Buranawong, N. Witit-anun, S. Chaiyakun, P. Limsuwan
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Volume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.proeng.2012.01.1310
File:
PDF, 478 KB
english, 2012
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