Structure and Surface Morphology of Cr-Zr-N Thin Films Deposited by Reactive DC Magnetron Sputtering
C. Chantharangsi, S. Denchitcharoen, S. Chaiyakun, P. LimsuwanVolume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.proeng.2012.02.025
File:
PDF, 595 KB
english, 2012