States of Particles in DC Magnetron Sputtering Deposition of Titanium Metallic
W. Kongsri, S. Chaiyakun, N. Witit-Anun, K. Honglertkongsakul, A. Buranawong, S. Limsuwan, P. LimsuwanVolume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.proeng.2012.02.036
File:
PDF, 1013 KB
english, 2012