Single Langmuir Probe Measurements in an Unbalanced Magnetron Sputtering System
K. Honglertkongsakul, S. Chaiyakun, N. Witit-anun, W. Kongsri, P. LimsuwanVolume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.proeng.2012.02.039
File:
PDF, 374 KB
english, 2012