Integrated thin-film piezoelectric traveling wave...

Sensors and Actuators A: Physical 2012 Vol. 188; Iss. none

Integrated thin-film piezoelectric traveling wave ultrasonic motors

Gabriel L. Smith, Ryan Q. Rudy, Ronald G. Polcawich, Don L. DeVoe
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Volume:
188
Year:
2012
Language:
english
DOI:
10.1016/j.sna.2011.12.029
File:
PDF, 2.06 MB
english, 2012
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