Investigation of temporary stiction in poly-SiGe micromirror arrays
F.Z. Ling, J. De Coster, Wan-Yu Lin, A. Witvrouw, J.-P. Celis, I. De WolfVolume:
188
Year:
2012
Language:
english
DOI:
10.1016/j.sna.2012.01.011
File:
PDF, 1.23 MB
english, 2012