Reducing stiction in microelectromechanical systems by...

Sensors and Actuators A: Physical 2012 Vol. 188; Iss. none

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

R.L. Puurunen, A. Häärä, H. Saloniemi, J. Dekker, M. Kainlauri, H. Pohjonen, T. Suni, J. Kiihamäki, E. Santala, M. Leskelä, H. Kattelus
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
188
Year:
2012
Language:
english
DOI:
10.1016/j.sna.2012.01.040
File:
PDF, 692 KB
english, 2012
Conversion to is in progress
Conversion to is failed