Monocrystalline thin-film waferlevel encapsulation of microsystems using porous silicon
A. Prümm, K.-H. Kraft, P. Gottschling, M. Ahles, S. Armbruster, M. Metz, J.N. BurghartzVolume:
188
Year:
2012
Language:
english
DOI:
10.1016/j.sna.2012.02.035
File:
PDF, 1.52 MB
english, 2012