Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
Kah How Koh, Takeshi Kobayashi, Chengkuo LeeVolume:
184
Year:
2012
Language:
english
DOI:
10.1016/j.sna.2012.06.018
File:
PDF, 2.64 MB
english, 2012